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Open-loop & Closed-loop Interferometer Modes

Open-loop Mode

  • Open-loop Mode (also know as Align Mode) is a diagnostic mode where the interferometer swing-arm operates without fringe-counting feedback from the metrology laser
  • This mode can be used to align the metrology laser and quadrature detector to peak the signal
  • Three values are displayed in real time
    • F:  Fringe, amplitude (%) of laser signal
    • D:  Dephase, amplitude (%) of laser signal
    • Phase:  Phase (degrees) between the two signals
  • Nominal values are
    • F/D > 5% (absolute minimum), >10% (preferred)
    • Phase ~ 45 degrees

Closed-loop Mode

  • Closed-loop Mode is a diagnostic mode where the interferometer swing-arm operates with fringe-counting feedback from the metrology laser
  • This mode can be used to align the white light source to peak the signal
  • Four values are displayed in real time
    • WL:  White Light, amplitude (%) of white light signal and fringe counts in brackets
    • F:  Fringe, amplitude (%) of laser signal
    • D:  Dephase, amplitude (%) of laser signal
    • Phase:  Phase (degrees) between the two signals

Procedure

  1. Make sure the AERI is powered ON, and a computer is connected
  2. Close any AERI software that is running (Ingest, FTSW)
  3. Open an internet browser and go to the address of the interferometer
    • http://169.254.44.127
    • Open the ‘Service’ page in the left bar (Fig. 1)
    • Type the password:  @Bb
  4. Alternatively, go straight to
    • http://169.254.44.127/admin-bin/production.cgi
  5. This opens the Production Menu (Fig. 2) from which you can select to enter either Open-loop Mode (Fig. 3) or Closed-loop Mode (Fig. 4) in the left bar
  6. After completing diagnostics, make sure to take the instrument out of Open/Closed-loop Mode by clicking ‘Open/Closed-loop Mode OFF’

 

ABB service menu

Figure 1. Interferometer Menu

ABB production menu

Figure 2. Production Menu

ABB open loop mode

Figure 3. Open-loop Mode

ABB closed loop mode

Figure 4. Closed-loop mode

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