Open-loop & Closed-loop Interferometer Modes
Open-loop Mode
- Open-loop Mode (also know as Align Mode) is a diagnostic mode where the interferometer swing-arm operates without fringe-counting feedback from the metrology laser
- This mode can be used to align the metrology laser and quadrature detector to peak the signal
- Three values are displayed in real time
- F: Fringe, amplitude (%) of laser signal
- D: Dephase, amplitude (%) of laser signal
- Phase: Phase (degrees) between the two signals
- Nominal values are
- F/D > 5% (absolute minimum), >10% (preferred)
- Phase ~ 45 degrees
Closed-loop Mode
- Closed-loop Mode is a diagnostic mode where the interferometer swing-arm operates with fringe-counting feedback from the metrology laser
- This mode can be used to align the white light source to peak the signal
- Four values are displayed in real time
- WL: White Light, amplitude (%) of white light signal and fringe counts in brackets
- F: Fringe, amplitude (%) of laser signal
- D: Dephase, amplitude (%) of laser signal
- Phase: Phase (degrees) between the two signals
Procedure
- Make sure the AERI is powered ON, and a computer is connected
- Close any AERI software that is running (Ingest, FTSW)
- Open an internet browser and go to the address of the interferometer
- http://169.254.44.127
- Open the ‘Service’ page in the left bar (Fig. 1)
- Type the password: @Bb
- Alternatively, go straight to
- http://169.254.44.127/admin-bin/production.cgi
- This opens the Production Menu (Fig. 2) from which you can select to enter either Open-loop Mode (Fig. 3) or Closed-loop Mode (Fig. 4) in the left bar
- After completing diagnostics, make sure to take the instrument out of Open/Closed-loop Mode by clicking ‘Open/Closed-loop Mode OFF’
Figure 1. Interferometer Menu
Figure 2. Production Menu
Figure 3. Open-loop Mode
Figure 4. Closed-loop mode